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SiCi_xNxthin films preparation by TEA-Co2 Laser induced Vapor-phase reaction and study of the nature of chemical bonds and some their electrical and optical properties . Baghdad Sci.J [Internet]. 2021 Mar. 8 [cited 2024 Apr. 27];1(2):239-46. Available from: https://bsj.uobaghdad.edu.iq/index.php/BSJ/article/view/553