Study of the electrical properties of Ion Beam Sputtered thin AlNiCo films

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T.K. Al-Ani

Abstract

The electrical properties of the AlNiCo thin films with thickness (1000oA) deposited on glass substrates using Ion – Beam sputtering (IBS) technique under vacuum <10-6 torr have been studied . Also it studied the effect of annealing temperature from this films , It is found that the effective energy decrease with increase of temperature and the conductivity decrease with increase temperature 323oK but after this degree the conductivity increasing .

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Study of the electrical properties of Ion Beam Sputtered thin AlNiCo films. Baghdad Sci.J [Internet]. 2007 Jun. 1 [cited 2024 Dec. 19];4(2):260-2. Available from: https://bsj.uobaghdad.edu.iq/index.php/BSJ/article/view/795
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How to Cite

1.
Study of the electrical properties of Ion Beam Sputtered thin AlNiCo films. Baghdad Sci.J [Internet]. 2007 Jun. 1 [cited 2024 Dec. 19];4(2):260-2. Available from: https://bsj.uobaghdad.edu.iq/index.php/BSJ/article/view/795